Thermal-piezoresistive pumping on double SiC layer resonator for effective quality factor tuning

Guzman, Pablo and Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Qamar, Afzaal and Lee, Jaesung and Zheng, X. Q. and Feng, Philip and Rais-Zadeh, Mina and Phan, Hoang-Phuong and Nguyen, Thanh ORCID: https://orcid.org/0000-0002-3213-6178 and Foisal, Abu Riduan Md and Li, Huaizhong and Nguyen, Nam-Trung and Dao, Dzung Viet (2022) Thermal-piezoresistive pumping on double SiC layer resonator for effective quality factor tuning. Sensors and Actuators: A. Physical, 343:113678. pp. 1-8. ISSN 0924-4247


Abstract

Active techniques that pump energy into MEMS mechanical resonant devices to improve their performance have attracted great research attention. Herein, we introduce a new concept of bi-layered monolithic silicon carbide resonators utilizing thermal-piezoresistive pumping to boost the quality factor. The device operates based on the electrothermal actuation as a result of a superimposed alternating and direct voltages. The structural stress modulates the electrothermal force generated in the device through the piezoresistive effect. Due to the negative piezoresistive coefficient of the actuator, the mechanical vibration of the structure is fed from the DC bias applied to the structure. The unique design of the double SiC layer allow energy pumped into the system via the thermal-piezoresistive coupling in highly doped SiC nano-film, enabling the enhancement of effective quality factor up to 15.5 %, from 12,200 to 14,100. The change in frequency related to the applied power was measured to be less than 1 % of the designed value. The saturation threshold of the pumping effect was reached at an applied power of 0.18 W. This works provides an avenue to improve the effective quality factor in MEMS bridge structure resonators by the coupling of the thermal-piezoresistive pumping and electrothermal actuation.


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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Additional Information: Files associated with this item cannot be displayed due to copyright restrictions.
Faculty/School / Institute/Centre: Current - Institute for Advanced Engineering and Space Sciences - Centre for Future Materials (1 Jan 2017 -)
Faculty/School / Institute/Centre: Current - Institute for Advanced Engineering and Space Sciences - Centre for Future Materials (1 Jan 2017 -)
Date Deposited: 21 Jun 2022 03:01
Last Modified: 17 Aug 2022 23:42
Uncontrolled Keywords: MEMS bridge resonator; Thermal-piezoresistive pumping; Electrothermal actuation; Silicon carbide
Fields of Research (2020): 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS)
Socio-Economic Objectives (2020): 28 EXPANDING KNOWLEDGE > 2801 Expanding knowledge > 280110 Expanding knowledge in engineering
Identification Number or DOI: https://doi.org/10.1016/j.sna.2022.113678
URI: http://eprints.usq.edu.au/id/eprint/49230

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