Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems

Truong, Thanh-An and Nguyen, Tuan-Khoa and Zhao, Hangbo and Nguyen, Nhat-Khuong and Dinh, Toan ORCID: and Park, Yoonseok and Nguyen, Thanh ORCID: and Yamauchi, Yusuke and Nguyen, Nam-Trung and Phan, Hoang-Phuong (2022) Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems. Small, 18 (4):2105748. pp. 1-29. ISSN 1613-6810


Transformation of conventional 2D platforms into unusual 3D configu-rations provides exciting opportunities for sensors, electronics, optical devices, and biological systems. Engineering material properties or control-ling and modulating stresses in thin films to pop-up 3D structures out of standard planar surfaces has been a highly active research topic over the last decade. Implementation of 3D micro and nanoarchitectures enables unprecedented functionalities including multiplexed, monolithic mechanical sensors, vertical integration of electronics components, and recording of neuron activities in 3D organoids. This paper provides an overview on stress engineering approaches to developing 3D functional microsystems. The paper systematically presents the origin of stresses generated in thin films and methods to transform a 2D design into an out-of-plane configu-ration. Different types of 3D micro and nanostructures, along with their applications in several areas are discussed. The paper concludes with cur-rent technical challenges and potential approaches and applications of this fast-growing research direction.

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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Additional Information: Files associated with this item cannot be displayed due to copyright restrictions.
Faculty/School / Institute/Centre: Current - Institute for Advanced Engineering and Space Sciences - Centre for Future Materials (1 Jan 2017 -)
Faculty/School / Institute/Centre: Current – Faculty of Health, Engineering and Sciences - School of Engineering (1 Jan 2022 -)
Date Deposited: 30 May 2022 02:58
Last Modified: 30 May 2022 02:58
Uncontrolled Keywords: 3d configurations; 3D Structure; Engineering materials; Micro-/nano-3d structure; Micro/nano; Planar surface; Research topics; Sensor electronics; Stress, thin film; Thin-films
Fields of Research (2020): 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS)
Socio-Economic Objectives (2020): 28 EXPANDING KNOWLEDGE > 2801 Expanding knowledge > 280110 Expanding knowledge in engineering
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