Interfacial effect of Cu electrode enhanced energy density of amorphous aluminum oxide dielectric capacitor

Yao, Manwen and Li, Chunyu and Su, Zhen and Li, Zaifang and Wang, Hao and Yao, Xi (2020) Interfacial effect of Cu electrode enhanced energy density of amorphous aluminum oxide dielectric capacitor. Journal of Alloys and Compounds, 855:157473. pp. 1-8. ISSN 0925-8388


In this work, a novel dielectric system of Cu/amorphous aluminum oxide/Pt (Cu/AmAO/Pt) is developed for dielectric capacitor applications. The high breakdown strength (425 MV m−1), high dielectric constant (8.6) and improved leakage current density are achieved due to this effective system. Dielectric capacitors with the structure of Cu/AmAO/Pt demonstrate much higher energy density of 6.9 J cm−3 than that of Au/AmAO (2.9 J cm−3). The enhanced performance of Cu/AmAO/Pt stems intrinsically from the interfacial effect under high electric field. The interfacial effect forms copper oxides and compacts the structure of AmAO, contributing to the improvement of breakdown strength and leakage current density. Anodized copper oxide also makes contribution to the increase of dielectric constant. Moreover, the oxidation mechanism is proposed for further understanding electrochemical behaviors. Based on the extensive applications of Cu in integrated circuits, high-energy-density Cu/AmAO/Pt system promises huge potential for the integrated circuit.

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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Faculty/School / Institute/Centre: No Faculty
Faculty/School / Institute/Centre: No Faculty
Date Deposited: 08 Mar 2022 01:51
Last Modified: 28 Mar 2022 04:06
Uncontrolled Keywords: Amorphous aluminum oxide; Cu top electrode; Dielectric capacitors; Energy storage; Interfacial effect
Fields of Research (2008): 09 Engineering > 0912 Materials Engineering > 091205 Functional Materials
Fields of Research (2020): 40 ENGINEERING > 4016 Materials engineering > 401605 Functional materials
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering
Socio-Economic Objectives (2020): 28 EXPANDING KNOWLEDGE > 2801 Expanding knowledge > 280110 Expanding knowledge in engineering
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