Reducing the mechanical hysteresis problem in optically-addressed diaphragm pressure sensors

Sharifian, S. A. and Buttsworth, D. R. (2002) Reducing the mechanical hysteresis problem in optically-addressed diaphragm pressure sensors. In: SPIE 2002: Vibration Measurements by Laser Techniques: Advances and Applications, 18-21 June 2002, Ancona, Italy.

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Abstract

Mechanical hysteresis problems associated with pressure sensors based on interferometric measurements of diaphragm deflection are discussed. The source and importance of each contribution to the net hysteresis is calculated and compared with experimental results. Possible methods to decrease hysteresis effects are presented. Based on these suggested methods, new sensors have been manufactured and their hysteresis evaluated. The results demonstrate that significant reductions in hysteresis can be achieved with minimum cost. Future sensor development will focus on materials selection and manufacturing methods to fully realize these improvements.


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Item Type: Conference or Workshop Item (Commonwealth Reporting Category E) (Paper)
Refereed: Yes
Item Status: Live Archive
Additional Information: Published version deposited in accordance with the copyright policy of the publisher.
Faculty / Department / School: Historic - Faculty of Engineering and Surveying - Department of Mechanical and Mechatronic Engineering
Date Deposited: 21 May 2013 05:49
Last Modified: 24 May 2013 04:12
Uncontrolled Keywords: Fabry-Perot interferometer; hysteresis; optically-addressed pressure sensor; pressure transducer; temperature; diaphragms; interferometry; optical sensors; pressure effects; thermal effects; transducers sensitivity
Fields of Research : 09 Engineering > 0906 Electrical and Electronic Engineering > 090605 Photodetectors, Optical Sensors and Solar Cells
09 Engineering > 0913 Mechanical Engineering > 091304 Dynamics, Vibration and Vibration Control
02 Physical Sciences > 0205 Optical Physics > 020502 Lasers and Quantum Electronics
Socio-Economic Objective: E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering
Identification Number or DOI: 10.1117/12.468141
URI: http://eprints.usq.edu.au/id/eprint/4029

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