Effect of different thermo-treatment at relatively low temperatures on the properties of indium tin-oxide thin films

Zhang, Shengli and Wang, Teng and Lin, Shuping and Zhang, Yi and Tesfamichael, Tuquabo and Bell, John and Wang, Hongxia (2017) Effect of different thermo-treatment at relatively low temperatures on the properties of indium tin-oxide thin films. Thin Solid Films, 636. pp. 702-709. ISSN 0040-6090


Abstract

Pulsed DC magnetron sputtering was used to deposit indium‑tin-oxide (ITO) thin films on glass substrates for application in photovoltaic devices as the final window layer. The evolution of crystal phase, morphology, resistivity and transmittance of the ITO films under different thermal annealing procedure (in-situ annealing versus post-annealing) at relatively low temperatures (up to 300 °C) were studied. Fully crystalline ITO films with low sheet resistance of 24 Ω/□ and high average transmittance (exclude glass substrate) of 90.10% with a Haacke's figure of merit 1.47 × 10− 2 Ω−1 were obtained by in-situ annealing at 200 °C. In comparison, the minimum temperature observed to fully crystalize the ITO thin films with competitive crystallinity, electrical and optical properties by post-annealing was 250 °C. The corresponding post-annealed 300 nm thick films showed sheet resistance of 49 Ω/□ and average transmittance (exclude glass substrate) as high as 91.93% with a Haacke's figure of merit 0.882 × 10− 2 Ω−1. The surface morphology of the as-deposited ITO films remained homogeneous after post-annealing whereas large particles (up to 100 nm) were observed on the surface of the films deposited by in-situ annealing. The results indicated that different thermal treatment procedures at lower temperatures produce significant effect on the electrical, optical and other physical properties of the ITO thin films which are critical for the window layer in photovoltaics.


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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Faculty/School / Institute/Centre: Current - USQ Other
Faculty/School / Institute/Centre: Current - USQ Other
Date Deposited: 17 Sep 2020 03:38
Last Modified: 24 Sep 2020 06:16
Uncontrolled Keywords: Indium tin oxide thin films; Pulsed DC magnetron sputtering; In-situ annealing; Post-annealing; Opto-electrical properties
Fields of Research (2008): 09 Engineering > 0912 Materials Engineering > 091299 Materials Engineering not elsewhere classified
Fields of Research (2020): 40 ENGINEERING > 4016 Materials engineering > 401699 Materials engineering not elsewhere classified
Socio-Economic Objectives (2008): B Economic Development > 85 Energy > 8505 Renewable Energy > 850599 Renewable Energy not elsewhere classified
Socio-Economic Objectives (2020): 17 ENERGY > 1708 Renewable energy > 170899 Renewable energy not elsewhere classified
Identification Number or DOI: https://doi.org/10.1016/j.tsf.2017.07.022
URI: http://eprints.usq.edu.au/id/eprint/39399

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