Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Nguyen, Nam-Trung and Dao, Dzung Viet (2018) Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors. Springer Briefs in Applied Sciences and Technology. Springer, Singapore. ISBN 9789811325700


Abstract

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures.


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Item Type: Book (Commonwealth Reporting Category A)
Refereed: Yes
Item Status: Live Archive
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Date Deposited: 03 Sep 2020 03:45
Last Modified: 17 Jun 2021 00:07
Uncontrolled Keywords: Thermoresistance; Temperature Coefficient of Resistance; Junction; Temperature Sensors; Thermal Flow Sensors; Convective Accelerometers; Convective Gyroscopes
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Fields of Research (2020): 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering
Identification Number or DOI: https://doi.org/10.1007/978-981-13-2571-7
URI: http://eprints.usq.edu.au/id/eprint/39128

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