Qamar, Afzaal and Phan, Hoang-Phuong and Dinh, Toan 
ORCID: https://orcid.org/0000-0002-7489-9640 and Nguyen, Nam-Trung and Rais-Zadeh, Mina
(2020)
ScAlN/3C-SiC/Si platform for monolithic integration of highly sensitive piezoelectric and piezoresistive devices.
Applied Physics Letters, 116 (13):132902.
ISSN 0003-6951
Abstract
This paper reports on a platform for monolithic integration of piezoelectric and piezoresistive devices on a single chip using the ScAlN/3C-SiC/Si heterostructure. Surface acoustic wave devices with an electromechanical coupling of 3.2% and an out-of-band rejection as high as 18 dB are demonstrated using the excellent piezoelectric properties of ScAlN and low acoustic loss of 3C-SiC. Additionally, a large piezoresistive effect in the low-doped n-type 3C-SiC(100) thin film has been observed, which exceeds the previously reported values in any SiC thin films. The growth of the n-type 3C-SiC thin film was performed using the low pressure chemical vapor deposition technique at 1250 °C and the standard micro-electro-mechanical systems process is used for the fabrication of 3C-SiC piezoresistors. The piezoresistive effect was measured using the bending beam method in different crystallographic orientations. The maximum gauge factor is –47 for the longitudinal [100] orientation. Using the longitudinal and transverse gauge factors for different crystallographic orientations, the fundamental piezoresistive coefficients of the low-doped n-type 3C-SiC thin film are measured to be π11=(−14.5±1.3)×10−11 Pa−1, π12=(5.5±0.5)×10−11 Pa−1, and π44=(−1.7±0.7)×10−11 Pa−1.
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| Item Type: | Article (Commonwealth Reporting Category C) |
|---|---|
| Refereed: | Yes |
| Item Status: | Live Archive |
| Additional Information: | Files associated with this item cannot be displayed due to copyright restrictions. |
| Faculty/School / Institute/Centre: | Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -) |
| Faculty/School / Institute/Centre: | Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -) |
| Date Deposited: | 13 Aug 2020 01:53 |
| Last Modified: | 31 Aug 2020 04:03 |
| Uncontrolled Keywords: | Acoustic surface wave devices; Acoustic waves; Aluminum compounds; Electromechanical coupling; Electromechanical devices; Gages; MEMS; Monolithic integrated circuits; Piezoelectricity; Silicon; Silicon carbide; Silicon compounds; Thin films; Vapor deposition |
| Fields of Research (2008): | 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS) |
| Socio-Economic Objectives (2008): | E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering |
| Identification Number or DOI: | https://doi.org/10.1063/5.0004943 |
| URI: | http://eprints.usq.edu.au/id/eprint/39093 |
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