Optoelectronic Enhancement for Piezoresistive Pressure Sensor

Nguyen, Thanh and Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Phan, Hoang-Phuong and Nguyen, Tuan-Khoa and Foisal, Abu Riduan Md and Nguyen, Nam-Trung and Dao, Dzung Viet (2020) Optoelectronic Enhancement for Piezoresistive Pressure Sensor. In: 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020), 18-22 Jan, 2020, Vancouver, Canada.


Abstract

Pressure sensing is a critical task of microelectromechanical systems with a wide range of applications. Enhancing the performance such as sensitivity, durability, reliability, linearity and response time of pressure sensors has always been a top priority for researchers and technology developers. This paper demonstrates a new method for enhancing the performance of a piezoresistive pressure sensor. By using light illumination combined with controlling supply current, the performance of a 3C-SiC/Si heterojunction piezoresistive pressure sensor is significantly improved. The sensitivity of the pressure sensor is enhanced a few hundred thousand times under bright condition in comparison with that under dark condition. This enhancement is unprecedented for a micromachined pressure sensor. In addition, the durability, signal to noise ratio and measurement range are substantially improved.


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Item Type: Conference or Workshop Item (Commonwealth Reporting Category E) (Paper)
Refereed: Yes
Item Status: Live Archive
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Date Deposited: 31 Aug 2020 06:16
Last Modified: 13 Oct 2020 04:46
Uncontrolled Keywords: Ultrasensitive pressure sensor, piezoresistive pressure sensor, optoelectronic coupling
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering
Identification Number or DOI: https://doi.org/10.1109/MEMS46641.2020.9056281
URI: http://eprints.usq.edu.au/id/eprint/39092

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