Nguyen, Thanh and Dinh, Toan 
ORCID: https://orcid.org/0000-0002-7489-9640 and Phan, Hoang-Phuong and Nguyen, Tuan-Khoa and Foisal, Abu Riduan Md and Nguyen, Nam-Trung and Dao, Dzung Viet
(2020)
Optoelectronic Enhancement for Piezoresistive Pressure Sensor.
In: 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020), 18-22 Jan, 2020, Vancouver, Canada.
Abstract
Pressure sensing is a critical task of microelectromechanical systems with a wide range of applications. Enhancing the performance such as sensitivity, durability, reliability, linearity and response time of pressure sensors has always been a top priority for researchers and technology developers. This paper demonstrates a new method for enhancing the performance of a piezoresistive pressure sensor. By using light illumination combined with controlling supply current, the performance of a 3C-SiC/Si heterojunction piezoresistive pressure sensor is significantly improved. The sensitivity of the pressure sensor is enhanced a few hundred thousand times under bright condition in comparison with that under dark condition. This enhancement is unprecedented for a micromachined pressure sensor. In addition, the durability, signal to noise ratio and measurement range are substantially improved.
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| Item Type: | Conference or Workshop Item (Commonwealth Reporting Category E) (Paper) |
|---|---|
| Refereed: | Yes |
| Item Status: | Live Archive |
| Faculty/School / Institute/Centre: | Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -) |
| Faculty/School / Institute/Centre: | Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -) |
| Date Deposited: | 31 Aug 2020 06:16 |
| Last Modified: | 13 Oct 2020 04:46 |
| Uncontrolled Keywords: | Ultrasensitive pressure sensor, piezoresistive pressure sensor, optoelectronic coupling |
| Fields of Research (2008): | 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS) |
| Fields of Research (2020): | 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS) |
| Socio-Economic Objectives (2008): | E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering |
| Identification Number or DOI: | https://doi.org/10.1109/MEMS46641.2020.9056281 |
| URI: | http://eprints.usq.edu.au/id/eprint/39092 |
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