Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect

Guzman, Pablo and Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Phan, Hoang-Phuong and Joyd, Abbin Perunnilathil and Qamar, Afzaal and Bahreyni, Behraad and Zhu, Yong and Rais-Zadeh, Mina and Li, Huaizhong and Nguyen, Nam-Trung and Dao, Dzung Viet (2020) Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect. Materials and Design, 194:108922. ISSN 0264-1275

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Abstract

Tuning the natural frequency of a resonator is an innovative approach for the implementation of mechanical resonators in a broad range of fields such as timing applications, filters or sensors. The conventional electrothermal technique is not favorable towards large tuning range because of its reliance on metallic heating elements. The use of metallic heaters could limit the tuning capability due to the mismatch in thermal expansion coefficients of materials forming the resonator. To solve this drawback, herein, the design, fabrication, and testing of a highly-doped SiC bridge resonator that excludes the use of metallic material as a heating element has been proposed. Instead, free-standing SiC structure functions as the mechanical resonant component as well as the heating element. Through the use of the Joule heating effect, a frequency tuning capability of almost ∆f/fo ≈ 80% has been demonstrated. The proposed device also exhibited a wide operating frequency range from 72.3 kHz to 14.5 kHz. Our SiC device enables the development of highly sensitive resonant-based sensors, especially in harsh environments.


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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Date Deposited: 13 Aug 2020 01:27
Last Modified: 31 Aug 2020 01:19
Uncontrolled Keywords: MEMS resonator; Electrothermal tuning; Joule heating; Silicon carbide
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Fields of Research (2020): 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering
Identification Number or DOI: https://doi.org/10.1016/j.matdes.2020.108922
URI: http://eprints.usq.edu.au/id/eprint/39090

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