Composite diamond-DLC coated nanoprobe tips for wear resistance and adhesion reduction

Guo, L. Q. and Shi, X. L. ORCID: and Zhao, X. M. and Bai, Y. and Qiao, L. J. (2012) Composite diamond-DLC coated nanoprobe tips for wear resistance and adhesion reduction. Surface and Coatings Technology, 206 (19-20). pp. 4099-4105. ISSN 0257-8972


The wear resistance of silicon probe is a crucial issue to assure the quality and reliability of atomic force microscope (AFM) measurements. In order to reduce the artifacts created by worn tip, the composite diamond and diamond-like-carbon (DLC) deposition on the silicon probe was investigated in this paper. The composite diamond-DLC film was deposited on the standard AFM silicon probe by the method of plasma-enhanced chemical vapor deposition. The morphology and composition of the coatings were characterized by scanning electron microscopy, AFM, and Raman spectroscopy. The wear resistance and scanning image quality of the composite diamond-DLC deposited probes were measured, as well the adhesive force under various humidity levels. The results showed that the composite diamond-DLC deposition reduced the adhesion and wear of the silicon probe, and extended the effective service life.

Statistics for USQ ePrint 38920
Statistics for this ePrint Item
Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Additional Information: Files associated with this item cannot be displayed due to copyright restrictions.
Faculty/School / Institute/Centre: No Faculty
Faculty/School / Institute/Centre: No Faculty
Date Deposited: 15 Sep 2020 02:56
Last Modified: 15 Sep 2020 04:28
Uncontrolled Keywords: diamond-DLC film; wear resistance; adhesion; atomic force microscope
Fields of Research (2008): 09 Engineering > 0912 Materials Engineering > 091205 Functional Materials
Fields of Research (2020): 40 ENGINEERING > 4016 Materials engineering > 401605 Functional materials
Identification Number or DOI:

Actions (login required)

View Item Archive Repository Staff Only