Investigation on the surface characterization of Ga-faced GaN after chemical-mechanical polishing

Gong, Hua and Pan, Guoshun and Zhou, Yan and Shi, Xiao-Lei ORCID: and Zou, Chunli and Zhang, Suman (2015) Investigation on the surface characterization of Ga-faced GaN after chemical-mechanical polishing. Applied Surface Science, 338. pp. 85-91. ISSN 0169-4332


The relationship between the surface characterization after chemical mechanical polishing (CMP) and the size of the silica (SiO2) abrasive used for CMP of gallium nitride (GaN) substrates was investigated in detail. Atomic force microscope was used for measuring the surface morphology, pit feature, pit depth distribution, and atomic step-terrace structure. With the decrease of SiO2 abrasive size, the pit depth reduced and the atomic step-terrace structure became more whole with smaller damage area, resulting in smaller roughness. For tiny-sized SiO2 abrasive, an almost complete atomic step-terrace structure with 0.0523 nm roughness was achieved. On the other hand, in order to acquire higher removal, Pt/C nanoparticle was employed as a catalyst in CMP slurry. The result indicates that when Pt/C catalyst content was reached to 1.0 ppm, material removal rate was increased by 47.69% compared to that by none of the catalyst, and besides, the pit depth reduced and the surface atomic step-terrace structure was not destroyed. The Pt/C nanoparticle is proved to be the promising catalyst to the surface preparation of super-hard and inert materials with high efficiency and good surface.

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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Additional Information: Permanent restricted access to Published version in accordance with the copyright policy of the publisher.
Faculty/School / Institute/Centre: No Faculty
Faculty/School / Institute/Centre: No Faculty
Date Deposited: 15 Sep 2020 02:00
Last Modified: 15 Sep 2020 04:35
Uncontrolled Keywords: chemical mechanical polishing; gallium nitride; SiO2 abrasive; catalyst; atomic step structurea
Fields of Research (2008): 09 Engineering > 0912 Materials Engineering > 091205 Functional Materials
Fields of Research (2020): 40 ENGINEERING > 4016 Materials engineering > 401605 Functional materials
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