Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology

Pham, Phuc Hong and Dinh, Toan Khac ORCID: https://orcid.org/0000-0002-7489-9640 and Dang, Lam Bao and Nguyen, Khoa Tuan and Dao, Dzung Viet (2015) Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology. Microsystem Technologies, 21 (3). pp. 699-706. ISSN 0946-7076


This paper reports a design and fabrication process of a micro cam system (MCS) with a flat-faced translating follower. The cam rim with cover diameter of 2.4 mm is driven by four electrostatic comb-drive actuators (ECA). Reciprocating motion of the ECAs is converted to unidirectional rotating movement of the outer cam rim through ratchet and anti-reverse mechanisms. The MCS was fabricated by using SOI (silicon on insulator) wafer with 30 μm thick device layer, and only one mask. Driven by periodic voltage with different frequencies, the performance of the MCS was successfully tested. In our experiment, when the system was run by the minimal driving voltage of 80 V, the obtained stroke of the follower was 160 μm. In addition, the system can run smoothly while applying the force of 31.3 μN on the follower. The MCS can be applied in micro valve structures, in micro assembling systems, etc.

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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Additional Information: Files associated with this item cannot be displayed due to copyright restrictions.
Faculty/School / Institute/Centre: No Faculty
Faculty/School / Institute/Centre: No Faculty
Date Deposited: 25 Jun 2020 03:03
Last Modified: 25 Jun 2020 03:03
Uncontrolled Keywords: micro cam systems
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Fields of Research (2020): 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering
Identification Number or DOI: https://doi.org/10.1007/s00542-014-2086-y
URI: http://eprints.usq.edu.au/id/eprint/38234

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