The effect of device geometry and crystal orientation on the stress-dependent offset voltage of 3C-SiC(100) four terminal devices

Qamar, Afzaal and Phan, Hoang-Phuong and Han, Jisheng and Tanner, Philip and Dinh, Toan ORCID: and Wang, Li and Dimitrijev, Sima and Dao, Dzung Viet (2015) The effect of device geometry and crystal orientation on the stress-dependent offset voltage of 3C-SiC(100) four terminal devices. Journal of Materials Chemistry C, 3 (34). pp. 8804-8809. ISSN 2050-7526


This communication reports for the first time, the impact of device geometry on the stress-dependent offset voltage of single crystal p-type 3C–SiC four terminal devices. Single crystal p-type 3C–SiC(100) was grown by low pressure chemical vapor deposition and three different device geometries (cross, rectangle and square) were fabricated using the conventional photolithography and dry etching processes. It was observed that the stress-dependent offset voltage of the devices strongly depends upon the device geometry and it can be increased by almost 100% by just selecting the appropriate device geometry. We also found that as the device is rotated within the (100) crystal plane its stress sensitivity varies from ≈0 to 9 × 10−11 Pa−1.

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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Additional Information: ©The Royal Society of Chemistry 2015. Permanent restricted access to Published version in accordance with the copyright policy of the publisher.
Faculty/School / Institute/Centre: No Faculty
Faculty/School / Institute/Centre: No Faculty
Date Deposited: 25 Jun 2020 05:11
Last Modified: 25 Jun 2020 05:11
Uncontrolled Keywords: terminal devices
Fields of Research (2008): 03 Chemical Sciences > 0306 Physical Chemistry (incl. Structural) > 030699 Physical Chemistry not elsewhere classified
09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
09 Engineering > 0912 Materials Engineering > 091205 Functional Materials
Fields of Research (2020): 34 CHEMICAL SCIENCES > 3406 Physical chemistry > 340699 Physical chemistry not elsewhere classified
40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS)
40 ENGINEERING > 4016 Materials engineering > 401605 Functional materials
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering
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