Qamar, Afzaal and Phan, Hoang-Phuong and Dao, Dzung Viet and Tanner, Philip and Dinh, Toan 
ORCID: https://orcid.org/0000-0002-7489-9640 and Wang, Li and Dimitrijev, Sima
(2015)
The dependence of offset voltage in p-type 3C-SiC van der Pauw device on applied strain.
IEEE Electron Device Letters, 36 (7):7110537.
pp. 708-710.
ISSN 0741-3106
Abstract
This letter reports for the first time the strain dependence of the offset voltage in p-type 3C-SiC van der Pauw square device. The p-type 3C-SiC thin film was epitaxially grown on a p-type Si(100) wafer using low pressure chemical vapor deposition followed by a conventional photolithography and dry etch processes, forming four-terminal van der Pauw device. The influence of applied tensile and compressive strain on the offset voltage of the van der Pauw device was investigated using the bending beam method. Experimental results showed that the offset voltage of the device is significantly changed by applied compressive and tensile strain, indicating the feasibility of using this effect for mechanical sensing applications. The sensitivity of the device to the applied strain has been found to be 70 (mV/A)/ppm
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| Item Type: | Article (Commonwealth Reporting Category C) |
|---|---|
| Refereed: | Yes |
| Item Status: | Live Archive |
| Additional Information: | Permanent restricted access to Published version, in accordance with the copyright policy of the publisher. |
| Faculty/School / Institute/Centre: | No Faculty |
| Faculty/School / Institute/Centre: | No Faculty |
| Date Deposited: | 01 May 2020 04:42 |
| Last Modified: | 01 May 2020 04:42 |
| Uncontrolled Keywords: | p-type 3C-SiC, van der Pauw device, strain sensor |
| Fields of Research (2008): | 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS) 09 Engineering > 0906 Electrical and Electronic Engineering > 090699 Electrical and Electronic Engineering not elsewhere classified |
| Fields of Research (2020): | 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS) 40 ENGINEERING > 4008 Electrical engineering > 400899 Electrical engineering not elsewhere classified |
| Socio-Economic Objectives (2008): | E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering |
| Identification Number or DOI: | https://doi.org/10.1109/LED.2015.2435153 |
| URI: | http://eprints.usq.edu.au/id/eprint/38229 |
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