Piezoresistive effect of p-type single crystalline 3C-SiC on (111) plane

Dao, Dzung Viet and Phan, Hoang-Phuong and Qamar, Afzaal and Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 (2016) Piezoresistive effect of p-type single crystalline 3C-SiC on (111) plane. RSC Advances, 6 (26). pp. 21302-21307.

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Abstract

This paper presents for the first time the effect of strain on the electrical conductivity of p-type single crystalline 3C-SiC grown on a Si (111) substrate. 3C-SiC thin film was epitaxially formed on a Si (111) substrate using the low pressure chemical vapor deposition process. The piezoresistive effect of the grown film was investigated using the bending beam method. The average longitudinal gauge factor of the p-type single crystalline 3C-SiC was found to be around 11 and isotropic in the (111) plane. This gauge factor is 3 times smaller than that in a p-type 3C-SiC (100) plane. This reduction of the gauge factor was attributed to the high density of defects in the grown 3C-SiC (111) film. Nevertheless, the gauge factor of the p-type 3C-SiC (111) film is still approximately 5 times higher than that in most metals, indicating its potential for niche mechanical sensing applications.


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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Additional Information: Published version deposited in accordance with the copyright policy of the publisher.
Faculty/School / Institute/Centre: No Faculty
Faculty/School / Institute/Centre: No Faculty
Date Deposited: 17 Mar 2020 01:54
Last Modified: 27 Mar 2020 05:06
Uncontrolled Keywords: sensors, stresses, stress sensors, crystalline materials, deposition, gages, thin films
Fields of Research (2008): 03 Chemical Sciences > 0306 Physical Chemistry (incl. Structural) > 030699 Physical Chemistry not elsewhere classified
09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Fields of Research (2020): 34 CHEMICAL SCIENCES > 3406 Physical chemistry > 340699 Physical chemistry not elsewhere classified
40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering
Identification Number or DOI: https://doi.org/10.1039/c5ra28164d
URI: http://eprints.usq.edu.au/id/eprint/38219

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