Phan, Hoang-Phuong and Dinh, Toan 
ORCID: https://orcid.org/0000-0002-7489-9640 and Kozeki, Takahiro and Nguyen, Tuan-Khoa and Qamar, Afzaal and Namazu, Takahiro and Nguyen, Nam-Trung and Dao, Dzung Viet
(2016)
Nano strain-amplifier: Making ultra-sensitive piezoresistance in nanowires possible without the need of quantum and surface charge effects.
Applied Physics Letters, 109 (12):123502.
ISSN 0003-6951
Abstract
This paper presents an innovative nano strain-amplifier employed to significantly enhance the sensitivity of piezoresistive strain sensors. Inspired from the dogbone structure, the nano strain-amplifier consists of a nano thin frame released from the substrate, where nanowires were formed at the centre of the frame. Analytical and numerical results indicated that a nano strain-amplifier significantly increases the strain induced into a free standing nanowire, resulting in a large change in their electrical conductance. The proposed structure was demonstrated in p-type cubic silicon carbide nanowires fabricated using a top down process. The experimental data showed that the nano strain-amplifier can enhance the sensitivity of SiC strain sensors at least 5.4 times larger than that of the conventional structures. This result indicates the potential of the proposed strain-amplifier for ultra-sensitive mechanical sensing applications.
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| Item Type: | Article (Commonwealth Reporting Category C) |
|---|---|
| Refereed: | Yes |
| Item Status: | Live Archive |
| Faculty/School / Institute/Centre: | Historic - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 - 31 Dec 2021) |
| Faculty/School / Institute/Centre: | Historic - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 - 31 Dec 2021) |
| Date Deposited: | 12 Aug 2020 23:47 |
| Last Modified: | 11 Sep 2020 00:54 |
| Uncontrolled Keywords: | Field-effect transistors; silicon nanowires; thin-films; sensors; stress |
| Fields of Research (2008): | 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS) |
| Fields of Research (2020): | 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS) |
| Socio-Economic Objectives (2008): | E Expanding Knowledge > 97 Expanding Knowledge > 970102 Expanding Knowledge in the Physical Sciences |
| Identification Number or DOI: | https://doi.org/10.1063/1.4963258 |
| URI: | http://eprints.usq.edu.au/id/eprint/38215 |
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