Design and fabrication of electrothermal SiC nanoresonators for high-resolution nanoparticle sensing

Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Phan, Hoang-Phuong and Kozeki, Takahiro and Qamar, Afzaal and Namazu, Takahiro and Zhu, Yong and Nguyen, Nam-Trung and Dao, Dzung Viet (2016) Design and fabrication of electrothermal SiC nanoresonators for high-resolution nanoparticle sensing. In: 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO 2016), 22-25 Aug, 2016, Sendai, Japan.


Abstract

In this work, we present the design and fabrication of high-frequency SiC nanoresonators for highly sensitive nanoparticle sensing. A 280-nm single crystalline SiC film was grown on a Si wafer, and released from the substrate using an isotropic dry etching process. The SiC nanoresonators were then formed using the Focused Ion Beam technique. The simulation results show that the as-fabricated resonators can be thermally actuated at a very high in-plane resonant frequency of 366.11 MHz, and utilized as sensitive nano-particle sensing elements with a high mass sensitivity of 233 kHz/femtogram. These data indicate the possibility of developing SiC nanoresonators for high-resolution mass sensing and other high-frequency applications.


Statistics for USQ ePrint 38210
Statistics for this ePrint Item
Item Type: Conference or Workshop Item (Commonwealth Reporting Category E) (Paper)
Refereed: Yes
Item Status: Live Archive
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Date Deposited: 02 Sep 2020 04:58
Last Modified: 30 Sep 2020 05:37
Uncontrolled Keywords: Silicon carbide, Sensors, Resonant frequency, Silicon, Actuators, Fabrication, Chemical sensors
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Fields of Research (2020): 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970102 Expanding Knowledge in the Physical Sciences
Identification Number or DOI: https://doi.org/10.1109/NANO.2016.7751454
URI: http://eprints.usq.edu.au/id/eprint/38210

Actions (login required)

View Item Archive Repository Staff Only