3C-SiC on glass: an ideal platform for temperature sensors under visible light illumination

Foisal, Abu Riduan Md and Phan, Hoang-Phuong and Kozeki, Takahiro and Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Nguyen, Tuan-Khoa and Qamar, Afzaal and Lobino, Mirko and Namazu, Takahiro and Dao, Dzung Viet (2016) 3C-SiC on glass: an ideal platform for temperature sensors under visible light illumination. RSC Advances, 6 (90). pp. 87124-87127.

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Abstract

This letter reports on cubic silicon carbide (3C–SiC) transferred on a glass substrate as an ideal platform for thermoresistive sensors which can be used for in situ temperature measurement during optical analysis. The transfer of SiC onto an insulating substrate prevents current leakage through the SiC/Si junction, which is significantly influenced by visible light. Experimental data shows that the 3C–SiC on glass based sensor possesses a large temperature coefficient of resistance (TCR) of up to −7508 ppm K−1, which is about 10 times larger than that of highly doped Si. Moreover, the 3C–SiC based temperature sensor also outperforms low doped Si in terms of stability against visible light. These results indicate that 3C–SiC on glass could be a good thermoresistive sensor to measure the temperature of cells during optical investigations.


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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Additional Information: Published version deposited in accordance with the copyright policy of the publisher.
Faculty/School / Institute/Centre: No Faculty
Faculty/School / Institute/Centre: No Faculty
Date Deposited: 06 Jul 2020 06:45
Last Modified: 11 Sep 2020 00:51
Uncontrolled Keywords: pressure Sensor; low pressure chemical vapor deposition; flip chip
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Fields of Research (2020): 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970102 Expanding Knowledge in the Physical Sciences
Identification Number or DOI: https://doi.org/10.1039/c6ra19418d
URI: http://eprints.usq.edu.au/id/eprint/38209

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