Thermoresistive effect for advanced thermal sensors: Fundamentals, design considerations, and applications

Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Phan, Hoang-Phuong and Qamar, Afzaal and Woodfield, Peter and Nguyen, Nam-Trung and Dao, Dzung Viet (2017) Thermoresistive effect for advanced thermal sensors: Fundamentals, design considerations, and applications. Journal of Microelectromechanical Systems, 26 (5):7947173. pp. 966-986. ISSN 1057-7157


Abstract

Microelectromechanical systems sensors have been intensively developed utilizing various physical concepts, such as piezoresistive, piezoelectric, and thermoresistive effects. Among these sensing concepts, the thermoresistive effect is of interest for a wide range of thermal sensors and devices, thanks to its simplicity in implementation and high sensitivity. The effect of temperature on the electrical resistance of some metals and semiconductors has been thoroughly investigated, leading to the significant growth and successful demonstration of thermal-based sensors, such as temperature sensors, convective accelerometers and gyroscopes, and thermal flow sensors. In this paper, we review the fundamentals of the thermoresistive effect in metals and semiconductors. We also discuss the influence of design and fabrication parameters on the thermoresistive sensitivity. This paper includes several desirable features of thermoresistive sensors and recent developments in these sensors are summarized. This review provides insights into how it is affected by various parameters, and useful guidance for industrial designers in terms of high sensitivity and linearity and fast response.


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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Additional Information: Files associated with this item cannot be displayed due to copyright restrictions.
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Date Deposited: 07 Aug 2020 03:02
Last Modified: 11 Sep 2020 01:26
Uncontrolled Keywords: Thermoresistive effect; semiconductor; metal; two-dimensional (2-D) material; thermal sensor; temperature sensor; thermal flow sensor; convective accelerometer; gyroscope
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Fields of Research (2020): 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970102 Expanding Knowledge in the Physical Sciences
Identification Number or DOI: https://doi.org/10.1109/JMEMS.2017.2710354
URI: http://eprints.usq.edu.au/id/eprint/38207

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