Superior robust ultrathin single-crystalline silicon carbide membrane as a versatile platform for biological applications

Nguyen, Tuan-Khoa and Phan, Hoang-Phuong and Kamble, Harshad and Vadivelu, Raja and Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Iacopi, Alan and Walker, Glenn and Hold, Leonie and Nguyen, Nam-Trung and Dao, Dzung Viet (2017) Superior robust ultrathin single-crystalline silicon carbide membrane as a versatile platform for biological applications. ACS Applied Materials and Interfaces, 9 (48). pp. 41641-41647. ISSN 1944-8244


Abstract

Micromachined membranes are promising platforms for cell culture thanks to their miniaturization and integration capabilities. Possessing chemical inertness, biocompatibility, and integration, silicon carbide (SiC) membranes have attracted great interest toward biological applications. In this paper, we present the batch fabrication, mechanical characterizations, and cell culture demonstration of robust ultrathin epitaxial deposited SiC membranes. The as-fabricated ultrathin SiC membranes, with an ultrahigh aspect ratio (length/thickness) of up to 20 000, possess high a fracture strength up to 2.95 GPa and deformation up to 50 μm. A high optical transmittance of above 80% at visible wavelengths was obtained for 50 nm membranes. The as-fabricated membranes were experimentally demonstrated as an excellent substrate platform for bio-MEMS/NEMS cell culture with the cell viability rate of more than 92% after 72 h. The ultrathin SiC membrane is promising for in vitro observations/imaging of bio-objects with an extremely short optical access.


Statistics for USQ ePrint 38205
Statistics for this ePrint Item
Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Additional Information: Files associated with this item cannot be displayed due to copyright restrictions.
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Date Deposited: 07 Aug 2020 01:43
Last Modified: 11 Sep 2020 01:25
Uncontrolled Keywords: cell culture; LPCVD; membrane; silicon carbide; ultrathin
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970102 Expanding Knowledge in the Physical Sciences
Identification Number or DOI: https://doi.org/10.1021/acsami.7b15381
URI: http://eprints.usq.edu.au/id/eprint/38205

Actions (login required)

View Item Archive Repository Staff Only