Steady-state analytical model of suspended p-type 3C-SiC bridges under consideration of Joule heating

Balakrishnan, Vivekananthan and Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Phan, Hoang-Phuong and Kozeki, Takahiro and Namazu, Takahiro and Dao, Dzung and Nguyen, Nam-Trung (2017) Steady-state analytical model of suspended p-type 3C-SiC bridges under consideration of Joule heating. Journal of Micromechanics and Microengineering, 27 (5):075008. ISSN 0960-1317


Abstract

This paper reports an analytical model and its validation for a released microscale heater made of 3C–SiC thin films. A model for the equivalent electrical and thermal parameters was developed for the two-layer multi-segment heat and electric conduction. The model is based on a 1D energy equation, which considers the temperature-dependent resistivity and allows for the prediction of voltage–current and power–current characteristics of the microheater. The steady-state analytical model was validated by experimental characterization. The results, in particular the nonlinearity caused by temperature dependency, are in good agreement. The low power consumption of the order of 0.18 mW at approximately 310 K indicates the potential use of the structure as thermal sensors in portable applications.


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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Additional Information: Files associated with this item cannot be displayed due to copyright restrictions.
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Date Deposited: 07 Aug 2020 01:33
Last Modified: 11 Sep 2020 01:24
Uncontrolled Keywords: Joule heating; 3C-SiC; microheater; steady-state; non-linearity
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970102 Expanding Knowledge in the Physical Sciences
Identification Number or DOI: https://doi.org/10.1088/1361-6439/aa7180
URI: http://eprints.usq.edu.au/id/eprint/38204

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