Foisal, Abu Riduan Md and Phan, Hoang-Phuong and Dinh, Toan 
ORCID: https://orcid.org/0000-0002-7489-9640 and Nguyen, Tuan-Khoa and Tanner, Philip and Streed, Erik W. and Dao, Dzung Viet
(2017)
Pushing the limits of piezoresistive effect by optomechanical coupling in 3C-SiC/Si heterostructure.
ACS Applied Materials and Interfaces, 9 (46).
pp. 39921-39925.
ISSN 1944-8244
Abstract
This letter reports a giant opto-piezoresistive effect in p-3C-SiC/p-Si heterostructure under visible-light illumination. The p-3C-SiC/p-Si heterostructure has been fabricated by growing a 390 nm p-type 3C-SiC on a p-type Si substrate using the low pressure chemical vapor deposition (LPCVD) technique. The gauge factor of the heterostructure was found to be 28 under a dark condition; however, it significantly increased to about −455 under illumination of 635 nm wavelength at 3.0 mW/cm2. This gauge factor is over 200 times higher than that of commercial metal strain gauge, 16 times higher than that of 3C-SiC thinfilm, and approximately 5 times larger than that of bulk Si. This enhancement of the gauge factor was attributed to the opto-mechanical coupling effect in p-3C-SiC/p-Si heterostructure. The opto-mechanical coupling effect is the amplified effect of the photoconductivity enhancement and strain-induced band structure modification in the p-type Si substrate. These findings enable extremely high sensitive and robust mechanical sensors, as well as optical sensors at low cost, as no complicated nanofabrication process is required.
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| Item Type: | Article (Commonwealth Reporting Category C) |
|---|---|
| Refereed: | Yes |
| Item Status: | Live Archive |
| Additional Information: | Files associated with this item cannot be displayed due to copyright restrictions. |
| Faculty/School / Institute/Centre: | Historic - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 - 31 Dec 2021) |
| Faculty/School / Institute/Centre: | Historic - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 - 31 Dec 2021) |
| Date Deposited: | 06 Aug 2020 23:53 |
| Last Modified: | 11 Sep 2020 01:02 |
| Uncontrolled Keywords: | 3C-SiC; heterostructure; opto-piezoresistive; opto-mechanical coupling; gauge factor |
| Fields of Research (2008): | 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS) |
| Fields of Research (2020): | 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS) |
| Socio-Economic Objectives (2008): | E Expanding Knowledge > 97 Expanding Knowledge > 970102 Expanding Knowledge in the Physical Sciences |
| Identification Number or DOI: | https://doi.org/10.1021/acsami.7b12128 |
| URI: | http://eprints.usq.edu.au/id/eprint/38199 |
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