Nguyen, Tuan-Khoa and Phan, Hoang-Phuong and Han, Jisheng and Dinh, Toan 
ORCID: https://orcid.org/0000-0002-7489-9640 and Foisal, Abu Riduan Md and Zhu, Yong and Nguyen, Nam-Trung and Dao, Dzung Viet
(2018)
Utilizing large hall offset voltage for conversion free 4H SiC strain sensor.
In: 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018), 21-25 Jan, 2018, Belfast, United Kingdom.
Abstract
This work presents a conversion free p-type 4H silicon carbide (4H-SiC) four-terminal strain sensor utilizing a large Hall offset voltage in a symmetric four-terminal configuration. Upon the application of mechanical strain, a high sensitivity of 209 mV/A/ppm was obtained. The strain sensor also exhibited good repeatability and linearity with a significantly large offset voltage in the induced strain ranging from 0 to 334ppm. Coupled these performances with the excellent mechanical strength, electrical conductivity, thermal stability, and chemical inertness of the SiC material, the proposed 4H-SiC strain sensor is promising for stress/strain monitoring for harsh operating environments with high signal-to-noise ratio.
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| Item Type: | Conference or Workshop Item (Commonwealth Reporting Category E) (Paper) |
|---|---|
| Refereed: | Yes |
| Item Status: | Live Archive |
| Faculty/School / Institute/Centre: | Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -) |
| Faculty/School / Institute/Centre: | Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -) |
| Date Deposited: | 02 Sep 2020 06:51 |
| Last Modified: | 30 Sep 2020 22:46 |
| Uncontrolled Keywords: | Capacitive sensors, Strain, Silicon carbide, Sensitivity, Temperature sensors, Monitoring |
| Fields of Research (2008): | 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS) |
| Fields of Research (2020): | 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS) |
| Socio-Economic Objectives (2008): | E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering |
| Identification Number or DOI: | https://doi.org/10.1109/MEMSYS.2018.8346697 |
| URI: | http://eprints.usq.edu.au/id/eprint/38190 |
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