Dinh, Toan 
ORCID: https://orcid.org/0000-0002-7489-9640 and Phan, Hoang-Phuong and Nguyen, Tuan-Khoa and Balakrishnan, Vivekananthan and Cheng, Han-Hao and Hold, Leonie and Lacopi, Alan and Nguyen, Nam-Trung and Dao, Dzung
(2018)
Unintentionally doped epitaxial 3C-SiC(111) nanothin film as material for highly sensitive thermal sensors at high temperatures.
IEEE Electron Device Letters, 39 (4).
pp. 580-583.
ISSN 0741-3106
Abstract
There is a growing interest and demand to develop sensors that operate at high temperatures. In this work, we investigate the temperature sensing properties of unintentionally doped n-type single crystalline cubic silicon carbide (SiC) for high temperatures up to 800 K. A highly sensitive temperature sensor was demonstrated with a temperature coefficient of conductivity (TCC) ranging from 1.96 × 10 4 to 5.18 × 10 4 ppm/K. The application of this material was successfully demonstrated as a hot film flow sensor with its high signal-to-noise response to air flow at elevated temperatures. The high TCC of the single crystalline SiC film at and above 800 K strongly revealed its potential for highly sensitive thermal sensors working at high temperatures.
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| Item Type: | Article (Commonwealth Reporting Category C) |
|---|---|
| Refereed: | Yes |
| Item Status: | Live Archive |
| Additional Information: | Files associated with this item cannot be displayed due to copyright restrictions. |
| Faculty/School / Institute/Centre: | Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -) |
| Faculty/School / Institute/Centre: | Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -) |
| Date Deposited: | 06 Aug 2020 02:41 |
| Last Modified: | 01 Mar 2021 05:57 |
| Uncontrolled Keywords: | Silicon carbide; temperature effect; thermal sensors; heater |
| Fields of Research (2008): | 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS) |
| Fields of Research (2020): | 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS) |
| Socio-Economic Objectives (2008): | E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering |
| Identification Number or DOI: | https://doi.org/10.1109/LED.2018.2808329 |
| URI: | http://eprints.usq.edu.au/id/eprint/38189 |
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