Ultra-thin LPCVD silicon carbide membrane: A promising platform for bio-cell culturing

Nguyen, Tuan-Khoa and Phan, Hoang-Phuong and Kamble, Harshad and Vadivelu, Raja and Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Iacopi, Alan and Walker, Glenn and Hold, Leonie and Nguyen, Nam-Trung and Dao, Dzung Viet (2018) Ultra-thin LPCVD silicon carbide membrane: A promising platform for bio-cell culturing. In: 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018), 21-25 Jan, 2018, Belfast, United Kingdom.


Abstract

This work presents the fabrication, mechanical strength characterization, and cell culture demonstration of a high aspect ratio silicon carbide (SiC) membrane. Optimizations in the deposition and fabrication make an ultra-high aspect ratio up to 20,000 SiC membranes with high fracture strength possible. Utilizing the superior properties of SiC material, the ultra-thin SiC membrane is a promising for cell culture/stretching devices, enabling very short optical accesses. The biocompatibility of the SiC membrane was confirmed with the 3T3 fibroblasts cell viability rate of 92.7%, in which the cells flattened and elongated their morphology while maintaining a strong adhesion to the SiC surface.


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Item Type: Conference or Workshop Item (Commonwealth Reporting Category E) (Paper)
Refereed: Yes
Item Status: Live Archive
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Date Deposited: 02 Sep 2020 22:57
Last Modified: 30 Sep 2020 22:45
Uncontrolled Keywords: Silicon carbide, Biomembranes, Silicon, Strain, Fabrication, Standards, Fibroblasts
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Fields of Research (2020): 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering
Identification Number or DOI: https://doi.org/10.1109/MEMSYS.2018.8346557
URI: http://eprints.usq.edu.au/id/eprint/38188

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