Optical and Electrical Characterizations of Nanoscale Robust 3C-SiC Membrane for UV Sensing Applications

Foisal, A. R. M. and Dinh, T. ORCID: https://orcid.org/0000-0002-7489-9640 and Iacopi, A. and Hold, L. and Streed, E. W. and Dao, D. V. (2018) Optical and Electrical Characterizations of Nanoscale Robust 3C-SiC Membrane for UV Sensing Applications. Key Engineering Materials, 775. pp. 278-282.


Abstract

This paper presents the fabrication and optical characterization of an ultrathin 3C-SiC membrane for UV light detection. SiC nanoscale film was grown on Si substrate and subsequently released to form a robust membrane with a high aspect ratio of about 5000. Transmission measurements were performed to determine the thickness of the film with a high accuracy of 98%. We also employed a simple and highly effective direct wirebonding technique to form electrical contacts to the SiC membrane. The considerable change in the photocurrent of the SiC membrane was observed under UV illumination, indicating the potential of using 3C-SiC membranes for UV detection.


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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Date Deposited: 03 Sep 2020 00:55
Last Modified: 17 Jun 2021 00:03
Uncontrolled Keywords: 3C-SiC membrane; Thickness calculation; Transmission spectrum; UV photodetector
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Fields of Research (2020): 40 ENGINEERING > 4017 Mechanical engineering > 401705 Microelectromechanical systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering
Identification Number or DOI: https://doi.org/10.4028/www.scientific.net/KEM.775.278
URI: http://eprints.usq.edu.au/id/eprint/38184

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