Highly sensitive pressure sensors employing 3C-SiC nanowires fabricated on a free standing structure

Phan, Hoang-Phuong and Dowling, Karen M. and Nguyen, Tuan-Khoa and Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Senesky, Debbie G. and Namazu, Takahiro and Dao, Viet Dzung and Nguyen, Nam-Trung (2018) Highly sensitive pressure sensors employing 3C-SiC nanowires fabricated on a free standing structure. Materials and Design, 156. pp. 16-21. ISSN 0264-1275


Abstract

This paper presents highly sensitive pressure sensors using piezoresistive nanowires. Our approach is based on nanowires locally fabricated on free standing structures with a high strain concentration. This strain concentration phenomenon amplifies the strain induced into nano-scaled sensing elements while the bulk materials are still at small strain regime, therefore enhancing the sensitivity of the sensors. For proof of concept, we utilized SiC nanowire fabricated using focused ion beam from an epitaxially grown thin film. Experimental results show significant 3-fold enhancement in the sensitivity in comparison to conventional structures, which is in good agreement with analytical modeling and numerical simulation. The proposed design shows potential for the development of miniaturized highly sensitive but robust nano mechanical-sensors.


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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Additional Information: Files associated with this item cannot be displayed due to copyright restrictions.
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Date Deposited: 30 Jul 2020 01:56
Last Modified: 11 Sep 2020 02:39
Uncontrolled Keywords: Piezoresistance; Nanowires; Pressure sensors; SiC
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering
Identification Number or DOI: https://doi.org/10.1016/j.matdes.2018.06.031
URI: http://eprints.usq.edu.au/id/eprint/38180

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