Highly sensitive p-Type 4H-SiC van der Pauw sensor

Nguyen, Tuan-Khoa and Phan, Hoang-Phuong and Han, Jisheng and Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Foisal, Abu Riduan Md and Dimitrijev, Sima and Zhu, Yong and Nguyen, Nam-Trung and Dao, Dzung Viet (2018) Highly sensitive p-Type 4H-SiC van der Pauw sensor. RSC Advances, 8 (6). pp. 3009-3013.

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Abstract

This paper presents for the first time a p-type 4H silicon carbide (4H-SiC) van der Pauw strain sensor by utilizing the strain induced effect in four-terminal devices. The sensor was fabricated from a 4H-SiC (0001) wafer, using a 1 μm thick p-type epilayer with a concentration of 1018 cm−3. Taking advantage of the four-terminal configuration, the sensor can eliminate the need for resistance-to-voltage conversion which is typically required for two-terminal devices. The van der Pauw sensor also exhibits an excellent repeatability and linearity with a significantly large output voltage in induced strain ranging from 0 to 334 ppm. Various sensors aligned in different orientations were measured and a high sensitivity of 26.3 ppm−1 was obtained. Combining these performances with the excellent mechanical strength, electrical conductivity, thermal stability, and chemical inertness of 4H-SiC, the proposed sensor is promising for strain monitoring in harsh environments.


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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Date Deposited: 30 Jul 2020 01:47
Last Modified: 17 Jun 2021 00:05
Uncontrolled Keywords: Pressure sensors; dependence; devices; stress; strain
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering
Identification Number or DOI: https://doi.org/10.1039/c7ra11922d
URI: http://eprints.usq.edu.au/id/eprint/38179

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