Qamar, Afzaal and Dinh, Toan 
ORCID: https://orcid.org/0000-0002-7489-9640 and Jafari, Mohsen and Iacopi, Alan and Dimitrijev, Sima and Dao, Dzung Viet
(2018)
A large pseudo-Hall effect in n-type 3C-SiC(1 0 0) and its dependence on crystallographic orientation for stress sensing applications.
Materials Letters, 213.
pp. 11-14.
ISSN 0167-577X
Abstract
The pseudo-Hall effect in n-type single crystal 3C-SiC(1 0 0) with low carrier concentration has been investigated. Low pressure chemical vapor deposition was used to grow the single crystal n-type 3C-SiC(1 0 0) and Hall devices were fabricated by photolithography and dry etch processes. A large pseudo-Hall effect was observed in the grown thin films which showed a strong dependence on the crystallographic orientation. N-type 3C-SiC(1 0 0) with low carrier concentration shows a completely different behavior of pseudo-Hall measurements as compared to the p-type 3C-SiC(1 0 0). Contrary to p-type, the effect is maximum along [1 0 0] crystallographic orientation and minimum along [1 1 0] orientation. Moreover, the observed pseudo-Hall effect is 50% larger than p-type with higher carrier concentration grown by the same process which makes n-type 3C-SiC(1 0 0) with low carrier concentration more suitable material for designing highly sensitive micro-mechanical sensors.
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| Item Type: | Article (Commonwealth Reporting Category C) |
|---|---|
| Refereed: | Yes |
| Item Status: | Live Archive |
| Additional Information: | Permanent restricted access to Published version in accordance with the copyright policy of the publisher. |
| Faculty/School / Institute/Centre: | No Faculty |
| Faculty/School / Institute/Centre: | No Faculty |
| Date Deposited: | 26 May 2020 04:41 |
| Last Modified: | 03 Jun 2020 04:24 |
| Uncontrolled Keywords: | 3C-SiC, piezoresistive effect, pseudo-Hall effect |
| Fields of Research (2008): | 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS) |
| Socio-Economic Objectives (2008): | E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering |
| Identification Number or DOI: | https://doi.org/10.1016/j.matlet.2017.10.117 |
| URI: | http://eprints.usq.edu.au/id/eprint/38165 |
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