Development of a vibrating-reed MEMS charge sensor on silicon-on-glass technology

Jalil, Jubayer and Zhu, Yong and Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Ruan, Yong (2019) Development of a vibrating-reed MEMS charge sensor on silicon-on-glass technology. In: 5th International Conference on Sustainable Design and Manufacturing (KES-SDM 2018), 24-26 June 2018, Gold Coast, Australia.


Abstract

A new development of a charge sensor based on MEMS vibrating-reed has been proposed in this work. The proposed charge sensing device has been fabricated on silicon-on-glass (SOG) technology than its silicon-on-insulator (SOI) counterpart. For the read-out circuit, a non-inverting voltage-mode amplifier with high pass filter has been designed by an operational amplifier IC. The MEMS charge sensor prototype achieved an experimental sensitivity of 5.5 × 109 V/C (in air) with good linearity and improved resolution.


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Item Type: Conference or Workshop Item (Commonwealth Reporting Category E) (Paper)
Refereed: Yes
Item Status: Live Archive
Additional Information: Permanent restricted access to Published version + Front Matter in accordance with the copyright policy of the publisher.
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Date Deposited: 02 Oct 2020 04:53
Last Modified: 09 Oct 2020 04:25
Uncontrolled Keywords: charge sensor; MEMS; silicon-on-glass; vibrating-reed
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering
Identification Number or DOI: https://doi.org/10.1007/978-3-030-04290-5_13
URI: http://eprints.usq.edu.au/id/eprint/38151

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