Dependence of offset voltage in AlGaN/GaN van der Pauw devices under mechanical strain

Nguyen, Hong-Quan and Moghadam, Hamid Amini and Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Phan, Hoang-Phuong and Nguyen, Tuan-Khoa and Han, Jisheng and Dimitrijev, Sima and Nguyen, Nam-Trung and Dao, Dzung Viet (2019) Dependence of offset voltage in AlGaN/GaN van der Pauw devices under mechanical strain. Materials Letters, 244. pp. 66-69. ISSN 0167-577X


Abstract

This work reports the strain dependence of the offset voltage in an AlGaN/GaN van der Pauw device under mechanical strain. The AlGaN/GaN heterostructure was grown on a sapphire (0 0 0 1) wafer by using a metal organic chemical vapor deposition (MOCVD) process. Taking advantage of the four-terminal configuration, the fabricated van der Pauw device exhibited an excellent repeatability and linearity with a significant change of the offset voltage under application of tensile and compressive strains. In particular, the sensitivity of the device to the applied strain was found to be as large as 3 (V/V)/ppm, indicating the feasibility of using this effect for mechanical sensing applications. The sensing mechanism of the device is explained via the alteration of the sheet carrier concentration at the AlGaN/GaN interface and the asymmetric current flux in the 2DEG van der Pauw device.


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Item Type: Article (Commonwealth Reporting Category C)
Refereed: Yes
Item Status: Live Archive
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 Jul 2013 -)
Date Deposited: 17 Jul 2020 01:23
Last Modified: 12 Oct 2020 03:27
Uncontrolled Keywords: AlGaN/GaN HEMT; Four-terminal device; Strain sensor
Fields of Research (2008): 09 Engineering > 0913 Mechanical Engineering > 091306 Microelectromechanical Systems (MEMS)
Socio-Economic Objectives (2008): E Expanding Knowledge > 97 Expanding Knowledge > 970109 Expanding Knowledge in Engineering
Identification Number or DOI: https://doi.org/10.1016/j.matlet.2019.02.050
URI: http://eprints.usq.edu.au/id/eprint/38150

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