Lithography and etching-free microfabrication of silicon carbide on insulator using direct UV laser ablation

Nguyen, Tuan-Khoa and Phan, Hoang-Phuong and Dowling, Karen M. and Yalamarthy, Ananth Saran and Dinh, Toan ORCID: https://orcid.org/0000-0002-7489-9640 and Balakrishnan, Vivekananthan and Liu, Tanya and Chapin, Caitlin A. and Truong, Quoc-Dung and Dau, Van Thanh and Goodson, Kenneth E. and Senesky, Debbie G. and Dao, Dzung Viet and Nguyen, Nam-Trung (2020) Lithography and etching-free microfabrication of silicon carbide on insulator using direct UV laser ablation. Advanced Engineering Materials, 22 (4):1901173. ISSN 1438-1656

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Abstract

Silicon carbide (SiC)‐based microsystems are promising alternatives for silicon‐based counterparts in a wide range of applications aiming at conditions of high temperature, high corrosion, and extreme vibration/shock. However, its high resistance to chemical substances makes the fabrication of SiC particularly challenging and less cost‐effective. To date, most SiC micromachining processes require time‐consuming and high‐cost SiC dry‐etching steps followed by metal wet etching, which slows down the prototyping and characterization process of SiC devices. This work presents a lithography and etching‐free microfabrication for 3C‐SiC on insulator‐based microelectromechanical systems (MEMS) devices. In particular, a direct laser ablation technique to replace the conventional lithography and etching processes to form functional SiC devices from 3C‐SiC‐on‐glass wafers is used. Utilizing a single line‐cutting mode, both metal contact shapes and SiC microstructures can be patterned simultaneously with a remarkably fast speed of over 20 cm s−1. As a proof of concept, several SiC microdevices, including temperature sensors, strain sensors, and microheaters, are demonstrated, showing the potential of the proposed technique for rapid and reliable prototyping of SiC‐based MEMS.


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Item Type: Article (Commonwealth Reporting Category C)
Refereed: No
Item Status: Live Archive
Additional Information: Files associated with this item cannot be displayed due to copyright restrictions.
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 July 2013 -)
Faculty/School / Institute/Centre: Current - Faculty of Health, Engineering and Sciences - School of Mechanical and Electrical Engineering (1 July 2013 -)
Date Deposited: 18 Feb 2020 01:50
Last Modified: 27 Jul 2020 00:44
Uncontrolled Keywords: force sensors; laser ablation; microheater; silicon carbide; temperature sensors
Fields of Research : 02 Physical Sciences > 0203 Classical Physics > 020399 Classical Physics not elsewhere classified
Socio-Economic Objective: E Expanding Knowledge > 97 Expanding Knowledge > 970102 Expanding Knowledge in the Physical Sciences
Identification Number or DOI: 10.1002/adem.201901173
URI: http://eprints.usq.edu.au/id/eprint/38047

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