Nie, Tian-Xiao and Lin, Jin-Hui and Chen, Zhi-Gang 
ORCID: https://orcid.org/0000-0002-9309-7993 and Shao, Yuan-Min and Wu, Yue-Qin and Yang, Xin-Ju and Fan, Yong-Liang and Jiang, Zui-Min and Zou, Jin
(2011)
Thermally oxidized formation of new Ge dots over as-grown Ge dots in the Si capping layer.
Journal of Applied Physics, 110 (11).
ISSN 0021-8979
Abstract
A Si-capped Ge quantum dot sample was self-assembly grown via Stranski-Krastanov mode in a molecular beam epitaxy system with the Si capping layer deposited at 300 C. After annealing the sample in an oxygen atmosphere at 1000 C, a structure, namely two layers of quantum dots, was formed with the newly formed Ge-rich quantum dots embedded in the oxidized matrix with the position accurately located upon the as-grown quantum dots. It has been found that the formation of such nanostructures strongly depends upon the growth temperature and oxygen atmosphere. A growth mechanism was proposed to explain the formation of the nanostructure based on the Ge diffusion from the as-grown quantum dots, Ge segregation from the growing oxide, and subsequent migration/agglomeration.
|
Statistics for this ePrint Item |
| Item Type: | Article (Commonwealth Reporting Category C) |
|---|---|
| Refereed: | Yes |
| Item Status: | Live Archive |
| Additional Information: | Published version cannot be displayed due to copyright restrictions. |
| Faculty/School / Institute/Centre: | No Faculty |
| Faculty/School / Institute/Centre: | No Faculty |
| Date Deposited: | 28 Jun 2017 05:36 |
| Last Modified: | 28 Jun 2017 05:36 |
| Uncontrolled Keywords: | as-grown; Ge diffusion; Ge dots; Ge quantum dot; Ge-segregation; growth mechanisms; oxygen atmosphere; Si capping layer; Stranski-Krastanov mode; thermally oxidized; two layers; single element semiconducting materials; semiconductor devices and integrated circuits; chemical products generally |
| Fields of Research (2008): | 03 Chemical Sciences > 0303 Macromolecular and Materials Chemistry > 030302 Nanochemistry and Supramolecular Chemistry |
| Socio-Economic Objectives (2008): | E Expanding Knowledge > 97 Expanding Knowledge > 970103 Expanding Knowledge in the Chemical Sciences |
| Identification Number or DOI: | https://doi.org/10.1063/1.3665398 |
| URI: | http://eprints.usq.edu.au/id/eprint/31729 |
Actions (login required)
 |
Archive Repository Staff Only |