Nie, Tian-Xiao and Lin, Jin-Hui and Chen, Zhi-Gang and Shao, Yuan-Min and Wu, Yue-Qin and Yang, Xin-Ju and Fan, Yong-Liang and Jiang, Zui-Min and Zou, Jin (2011) Thermally oxidized formation of new Ge dots over as-grown Ge dots in the Si capping layer. Journal of Applied Physics, 110 (11). ISSN 0021-8979
Abstract
A Si-capped Ge quantum dot sample was self-assembly grown via Stranski-Krastanov mode in a molecular beam epitaxy system with the Si capping layer deposited at 300 C. After annealing the sample in an oxygen atmosphere at 1000 C, a structure, namely two layers of quantum dots, was formed with the newly formed Ge-rich quantum dots embedded in the oxidized matrix with the position accurately located upon the as-grown quantum dots. It has been found that the formation of such nanostructures strongly depends upon the growth temperature and oxygen atmosphere. A growth mechanism was proposed to explain the formation of the nanostructure based on the Ge diffusion from the as-grown quantum dots, Ge segregation from the growing oxide, and subsequent migration/agglomeration.
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| Item Type: | Article (Commonwealth Reporting Category C) |
|---|---|
| Refereed: | Yes |
| Item Status: | Live Archive |
| Additional Information: | Published version cannot be displayed due to copyright restrictions. |
| Faculty / Department / School: | No Faculty |
| Date Deposited: | 28 Jun 2017 05:36 |
| Last Modified: | 28 Jun 2017 05:36 |
| Uncontrolled Keywords: | as-grown; Ge diffusion; Ge dots; Ge quantum dot; Ge-segregation; growth mechanisms; oxygen atmosphere; Si capping layer; Stranski-Krastanov mode; thermally oxidized; two layers; single element semiconducting materials; semiconductor devices and integrated circuits; chemical products generally |
| Fields of Research : | 03 Chemical Sciences > 0303 Macromolecular and Materials Chemistry > 030302 Nanochemistry and Supramolecular Chemistry |
| Socio-Economic Objective: | E Expanding Knowledge > 97 Expanding Knowledge > 970103 Expanding Knowledge in the Chemical Sciences |
| Identification Number or DOI: | 10.1063/1.3665398 |
| URI: | http://eprints.usq.edu.au/id/eprint/31729 |
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